![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A novel monolithically integrated pressure, accelerometer and temperature composite sensor
Quan Wang,, Li, Xinxin, Tie Li,, Bao, Minhang, Zhang, Kun, Xiaohong Ge,, Wei Zhou,, Haifei Bao,Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285926
File:
PDF, 784 KB
english, 2009