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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms
Lai, Yun-Ju, Li, Wei-Chang, Lin, Chih-Ming, Felmetsger, Valery V., Pisano, Albert P.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6627257
File:
PDF, 1.56 MB
english, 2013