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[IEEE 2008 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2008.12.15-2008.12.17)] 2008 IEEE International Electron Devices Meeting - Session 25: Special evening session the future of fabs
Stork, HansYear:
2008
Language:
english
DOI:
10.1109/iedm.2008.4796759
File:
PDF, 99 KB
english, 2008