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Nuclear-magnetic-resonance characterization of doped SiO2 films used in integrated circuits
Schilling, Frederic C., Steiner, Kurt G., Obeng, Yaw S.Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359877
File:
PDF, 1.24 MB
english, 1995