Thermal stability of copper nitride thin films: The role of nitrogen migration
Gonzalez-Arrabal, R., Gordillo, N., Martin-Gonzalez, M. S., Ruiz-Bustos, R., Agulló-López, F.Volume:
107
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3369450
File:
PDF, 800 KB
english, 2010