Control of the Step Coverage Behavior of Gate a-SiN...

Japanese Journal of Applied Physics 2000 / 1 Vol. 39; Iss. Part 1, No

Control of the Step Coverage Behavior of Gate a-SiN x :H

Chae, Gee-Sung, Kim, Kwang-Nam, Kitagawa, Hitoshi, Oba, Tomofumi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.39.217
Date:
January, 2000
File:
PDF, 577 KB
english, 2000
Conversion to is in progress
Conversion to is failed