Investigation of Optical, Electrical, and Mechanical...

Chemical Vapor Deposition 2014 / 09 Vol. 20; Iss. 7-8-9

Investigation of Optical, Electrical, and Mechanical Properties of MOCVD-grown ZrO 2 Films

Dang, Van-Son, Banerjee, Manish, Zhu, Huaizhi, Srinivasan, Nagendra Babu, Parala, Harish, Pfetzing-Micklich, Janine, Wieck, Andreas D., Devi, Anjana
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Volume:
20
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201407124
Date:
September, 2014
File:
PDF, 2.91 MB
english, 2014
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