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Principles for controlling the optical and electrical properties of hydrogenated amorphous silicon deposited from a silane plasma
Hishikawa, Yoshihiro, Tsuda, Shinya, Wakisaka, Kenichiro, Kuwano, YukinoriVolume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.352828
File:
PDF, 885 KB
english, 1993