![](/img/cover-not-exists.png)
Roughness at Si/SiO[sub 2] interfaces and silicon oxidation
Chen, Xidong, Gibson, J. M.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581807
File:
PDF, 578 KB
english, 1999