Low-Resistance Si/Ti/Al/Ni/Au Multilayer Ohmic Contact to...

Low-Resistance Si/Ti/Al/Ni/Au Multilayer Ohmic Contact to Undoped AlGaN/GaN Heterostructures

Desmaris, V., Eriksson, J., Rorsman, N., Zirath, H.
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Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1649399
File:
PDF, 60 KB
english, 2004
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