Experimental and numerical evaluations of adhesion strength...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2006 Vol. 24; Iss. 2

Experimental and numerical evaluations of adhesion strength and stress in TiN films deposited on ti-implanted aluminum

Xu, Ming, Liu, Youming, Li, Liuhe, Cai, Xun, Chen, Qiulong, Chu, Paul K.
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2165657
File:
PDF, 858 KB
english, 2006
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