[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Novel submicron process development tool for SAW device fabrication
Jacobs, Jim, Dufilie, PierreYear:
2014
Language:
english
DOI:
10.1109/ultsym.2014.0638
File:
PDF, 4.23 MB
english, 2014