New applications of the nanopositioning and nanomeasuring...

New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes

Manske, E, Hausotte, T, Mastylo, R, Machleidt, T, Franke, K-H, Jäger, G
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Volume:
18
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/18/2/S27
Date:
February, 2007
File:
PDF, 2.86 MB
english, 2007
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