New applications of the nanopositioning and nanomeasuring machine by using advanced tactile and non-tactile probes
Manske, E, Hausotte, T, Mastylo, R, Machleidt, T, Franke, K-H, Jäger, GVolume:
18
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/18/2/S27
Date:
February, 2007
File:
PDF, 2.86 MB
english, 2007