Silicon dioxide trench filling process in a radio-frequency...

Silicon dioxide trench filling process in a radio-frequency hollow cathode reactor

Gross, M.
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Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586664
Date:
March, 1993
File:
PDF, 1.03 MB
english, 1993
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