An atomic force microscope head designed for nanometrology

Measurement Science and Technology 2007 / 06 Vol. 18; Iss. 6

An atomic force microscope head designed for nanometrology

Lu, Mingzhen, Gao, Sitian, Jin, Qihai, Cui, Jianjun, Du, Hua, Gao, Hongtang
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Volume:
18
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/18/6/S11
Date:
June, 2007
File:
PDF, 295 KB
english, 2007
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