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[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Sub-nm order fluctuation control of narrowed pitch 2K-GxL™ device for high contrast
Ishikawa, Keita, Saruta, Kunihiko, Oniki, Kazunao, Taguchi, Ayumu, Yamaguchi, Masanari, Yamashita, Keitaro, Tamada, HitoshiYear:
2009
Language:
english
DOI:
10.1109/omems.2009.5338603
File:
PDF, 432 KB
english, 2009