A Novel Approach to Link Process Parameters to BSIM Model...

IEEE Transactions on Semiconductor Manufacturing 2009 / 11 Vol. 22; Iss. 4

A Novel Approach to Link Process Parameters to BSIM Model Parameters

Mande, S., Chandorkar, A.N., Cheng Hsaio,, Kasa Huang,, Yi-Ming Sheu,, Liu, S.
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Volume:
22
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2009.2031782
Date:
November, 2009
File:
PDF, 1.05 MB
english, 2009
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