Dry etching with gas chopping without rippled sidewalls

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1999 Vol. 17; Iss. 6

Dry etching with gas chopping without rippled sidewalls

Volland, B., Shi, F., Hudek, P., Heerlein, H., Rangelow, Ivo. W.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591061
File:
PDF, 774 KB
english, 1999
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