Metal electrode influence on the wet selective etching of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 4

Metal electrode influence on the wet selective etching of GaAs/AlGaAs

Jie, Wang, Qin, Han, Xiao-Hong, Yang, Xiu-Ping, Wang, Hai-Qiao, Ni, Ji-Fang, He
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3610969
File:
PDF, 641 KB
english, 2011
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