[IEEE 2014 IEEE 34th International Conference on Electronics and Nanotechnology (ELNANO) - Kyiv, Ukraine (2014.4.15-2014.4.18)] 2014 IEEE 34th International Scientific Conference on Electronics and Nanotechnology (ELNANO) - Deep plasma etching process investigation of polyimide materials for forming interlayer connections in microelectronic nodes
Vertyanov, D., Timoshenkov, S., Golishnikov, A., Nazarov, E., Putrya, M., Korobova, N., Kostyukov, D.Year:
2014
Language:
english
DOI:
10.1109/elnano.2014.6873961
File:
PDF, 773 KB
english, 2014