[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - An overview of quartz MEMS devices
Tanaka, MasakoYear:
2010
Language:
english
DOI:
10.1109/freq.2010.5556352
File:
PDF, 1.70 MB
english, 2010