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Novel fabrication of micromechanical oscillators with nanoscale sensitivity at room temperature
Chabot, M.D., Moreland, J.M., Lan Gao,, Sy-Hwang Liou,, Miller, C.W.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851869
Date:
October, 2005
File:
PDF, 1.87 MB
english, 2005