Novel fabrication of micromechanical oscillators with...

Novel fabrication of micromechanical oscillators with nanoscale sensitivity at room temperature

Chabot, M.D., Moreland, J.M., Lan Gao,, Sy-Hwang Liou,, Miller, C.W.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851869
Date:
October, 2005
File:
PDF, 1.87 MB
english, 2005
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