![](/img/cover-not-exists.png)
[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - A few deg/hr resolvable low noise lateral microgyroscope
Hyung-Taek Lim,, Jin-Woo Song,, Jang-Gyu Lee,, Yong-Kweon Kim,Year:
2002
Language:
english
DOI:
10.1109/memsys.2002.984349
File:
PDF, 563 KB
english, 2002