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Interface/Bulk Trap Recovery After Submelt Laser Anneal and...

IEEE Electron Device Letters 2010 / 06 Vol. 31; Iss. 6

Interface/Bulk Trap Recovery After Submelt Laser Anneal and the Impact to NBTI Reliability

Moonju Cho,, Aoulaiche, Marc, Degraeve, Robin, Ortolland, Claude, Kauerauf, Thomas, Kaczer, Ben, Roussel, Philippe, Hoffmann, Thomas Y, Groeseneken, Guido
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Volume:
31
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2010.2046009
Date:
June, 2010
File:
PDF, 223 KB
english, 2010
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