Replication and dimensional quality control of industrial...

CIRP Annals - Manufacturing Technology 2010 Vol. 59; Iss. 1

Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing

G. Tosello, H.N. Hansen, F. Marinello, S. Gasparin
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Volume:
59
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.cirp.2010.03.141
File:
PDF, 857 KB
english, 2010
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