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A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining
K. Katahira, K. Nakamoto, P. Fonda, H. Ohmori, K. YamazakiVolume:
60
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.cirp.2011.03.013
File:
PDF, 567 KB
english, 2011