[IEEE 2008 16th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Las Vegas, NV, USA (2008.09.30-2008.10.3)] 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Si spontaneous emission during RTP and its impact on low-temperature pyrometry
Li, J.P., Hunter, Aaron, Ramanujam, RajeshYear:
2008
Language:
english
DOI:
10.1109/rtp.2008.4690564
File:
PDF, 4.37 MB
english, 2008