Pt/TiN electrodes for stacked memory with polysilicon plug...

Integrated Ferroelectrics 1996 / 11 Vol. 13; Iss. 1-3

Pt/TiN electrodes for stacked memory with polysilicon plug utilizing PZT films

Kushida-abdelghafar, Keiko, Hiratani, Masahiko, Torii, Kazuyoshi, Fujisaki, Yoshihisa
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Volume:
13
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589608013085
Date:
November, 1996
File:
PDF, 648 KB
english, 1996
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