A liquid-filled buoyancy-driven convective micromachined...

A liquid-filled buoyancy-driven convective micromachined accelerometer

Lin, L., Jones, J.
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Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.856651
Date:
October, 2005
File:
PDF, 381 KB
english, 2005
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