Thin nitride films on textured polysilicon to increase...

IEEE Electron Device Letters 1990 / 07 Vol. 11; Iss. 7

Thin nitride films on textured polysilicon to increase multimegabit DRAM cell charge capacity

Fazan, P.C., Lee, R.R.
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Volume:
11
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.56474
Date:
July, 1990
File:
PDF, 318 KB
english, 1990
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