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[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Work function modulation for TiN/Ta/TiN metal gate electrode
Wang, Xiao-Rong, Jiang, Yu-Long, Xie, Qi, Detavernier, Christophe, Ru, Guo-Ping, Qu, Xin-Ping, Li, Bing-ZongYear:
2010
Language:
english
DOI:
10.1109/icsict.2010.5667488
File:
PDF, 377 KB
english, 2010