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[IEEE 2012 IEEE 39th International Conference on Plasma Sciences (ICOPS) - Edinburgh (2012.07.8-2012.07.13)] 2012 Abstracts IEEE International Conference on Plasma Science - Photoresists stripping using dielectric barrier glow discharge plasma system
Wu, Yuanwei, Jia, Shaoxia, Zhao, Lingli, Wang, ShouguoYear:
2012
Language:
english
DOI:
10.1109/plasma.2012.6383411
File:
PDF, 68 KB
english, 2012