[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Design and Implementation of a Novel CMOS-MEMS Single Proof-Mass Tri-Axis Accelerometer
Sun, Chih-Ming, Tsai, Ming-Han, Fang, WeileunYear:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805506
File:
PDF, 3.56 MB
english, 2009