[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Measurement of material properties for polysilicon thin films by an electrostatic force method
Zhang, Wei-Qing, Li, Wei-Hua, Zhou, Zai-Fa, Jiang, Min-xia, Liu, Hai-Yun, Huang, Qing-AnYear:
2012
Language:
english
DOI:
10.1109/icsens.2012.6411449
File:
PDF, 1020 KB
english, 2012