A micromachined impact microactuator driven by...

A micromachined impact microactuator driven by electrostatic force

Mita, M., Arai, M., Tensaka, S., Dai Kobayashi,, Fujita, H.
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Volume:
12
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.802906
Date:
February, 2003
File:
PDF, 620 KB
english, 2003
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