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[IEEE 2011 International Conference on Electric Information and Control Engineering (ICEICE) - Wuhan, China (2011.04.15-2011.04.17)] 2011 International Conference on Electric Information and Control Engineering - A double-end fixed beam structure of MEMS piezoresistive high g accelerometer
Jing Liang,, Yulong Zhao,, Zhengyong Duan,, Xiuping Tang,Year:
2011
DOI:
10.1109/iceice.2011.5777913
File:
PDF, 617 KB
2011