Cosputtered Metal and$hboxSiO_2$Layers for Use in...

IEEE Sensors Journal 2006 / 08 Vol. 6; Iss. 4

Cosputtered Metal and$hboxSiO_2$Layers for Use in Thick-Film MISiC$hboxNH_3$Sensors

Wingbrant, H., Persson, M., Abom, A.E., Eriksson, M., Andersson, B., Simko, S., Kubinski, D.J., Visser, J.H., Spetz, A.L.
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Volume:
6
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2006.877973
Date:
August, 2006
File:
PDF, 1.21 MB
english, 2006
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