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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Effect of micro-gap on sensing properties to dilute chlorine gas of indium oxide thin film microsensors
Jun Tamaki,, Jun Niimi,, Ogura, S., Konishi, S.Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1497476
File:
PDF, 680 KB
english, 2005