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[IEEE 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Suzhou, China (2013.08.26-2013.08.30)] 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - A piezoelectric inchworm actuator based on the principle of flexible amplification
Ma, Li, Jiang, Chenyang, Xiao, Jintao, Wang, Kun, Xie, Wei, Liu, BoYear:
2013
Language:
english
DOI:
10.1109/3m-nano.2013.6737414
File:
PDF, 617 KB
english, 2013