[IEEE 2009 IEEE International Ultrasonics Symposium - Rome, Italy (2009.09.20-2009.09.23)] 2009 IEEE International Ultrasonics Symposium - Highly oriented ta2o5 piezoelectric thin films prepared by rf-magnetron sputtering
Kakio, Shoji, Mitsui, Takeshi, Tsuchiya, Akinori, Nakagawa, YasuhikoYear:
2009
Language:
english
DOI:
10.1109/ultsym.2009.5441475
File:
PDF, 1.44 MB
english, 2009