[IEEE 2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003) - Munich, Germany (22-27 June 2003)] 2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003) (IEEE Cat. No.03TH8666) - Nano-milling of diffractive optics by F/sub 2/-laser ablation
Herman, P.R., Jianzhao Li,, Nejadmalayeri, A.H., Mi Li Ng,, Vick, A., Ihlemann, J.Year:
2003
Language:
english
DOI:
10.1109/cleoe.2003.1313619
File:
PDF, 88 KB
english, 2003