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Achieving Conduction Band-Edge Schottky Barrier Height for Arsenic-Segregated Nickel Aluminide Disilicide and Implementation in FinFETs With Ultra-Narrow Fin Widths
Rinus Tek-Po Lee,, Tsung-Yang Liow,, Kian-Ming Tan,, Lim, A.E.-J., Koh, A.T.-Y., Ming Zhu,, Guo-Qiang Lo,, Samudra, G.S., Dong Zhi Chi,, Yee-Chia Yeo,Volume:
29
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2008.917813
Date:
April, 2008
File:
PDF, 397 KB
english, 2008