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[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Investigation of half-tone phase shift mask with FIB and blue laser repair
Sang-Man Bae,, Do-Hwa Lee,, Hee-Mok Lee,, Myung-Goon Gill,, Bong-Ho Kim,, Dong-Jun Ahn,Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820859
File:
PDF, 525 KB
english, 1999