Evidence for inelastic processes for N+3 and N+4 from ion...

Journal of Applied Physics 1996 Vol. 79; Iss. 1

Evidence for inelastic processes for N+3 and N+4 from ion energy distributions in He/N2 radio frequency glow discharges

Hwang, Helen H., Olthoff, James K., Van Brunt, Richard J., Radovanov, Svetlana B., Kushner, Mark J.
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Volume:
79
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360795
File:
PDF, 362 KB
english, 1996
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