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[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Mapping the Edge Roughness of Test-Structure Features for Nanometer-Level CD Reference-Materials
Cresswell, M.W., Davidson, M., Mijares, G.I., Allen, R.A., Geist, J., Bishop, M.Year:
2009
Language:
english
DOI:
10.1109/icmts.2009.4814633
File:
PDF, 2.08 MB
english, 2009