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[IEEE 2008 33rd IEEE Photovolatic Specialists Conference (PVSC) - San Diego, CA, USA (2008.05.11-2008.05.16)] 2008 33rd IEEE Photovolatic Specialists Conference - Growth of μc-SiGe:H thin films diluted with helium and hydrogen by VHF-PECVD
Liping Zhang,, Jianjun Zhang,, Xin Zhang,, Zengxin Hu,, Zeren Shang,, Xinhua Geng,, Ying Zhao,Year:
2008
Language:
english
DOI:
10.1109/pvsc.2008.4922820
File:
PDF, 4.07 MB
english, 2008