Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 11 Vol. 32; Iss. 6
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Self-termination in the gas-phase layer-by-layer growth of an aza silane and water on planar silicon and nylon substrates
Gupta, Vipul, Diwan, Anubhav, Evans, Delwyn, Telford, Clive, Linford, Matthew R.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4899936
Date:
November, 2014
File:
PDF, 1.64 MB
english, 2014