Self-termination in the gas-phase layer-by-layer growth of...

Self-termination in the gas-phase layer-by-layer growth of an aza silane and water on planar silicon and nylon substrates

Gupta, Vipul, Diwan, Anubhav, Evans, Delwyn, Telford, Clive, Linford, Matthew R.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4899936
Date:
November, 2014
File:
PDF, 1.64 MB
english, 2014
Conversion to is in progress
Conversion to is failed