[IRE 1985 International Electron Devices Meeting - ()] 1985 International Electron Devices Meeting - The SPT cell—A new substrate-plate trench cell for DRAMs
Lu, N., Cottrell, P., Craig, W., Dash, S., Critchlow, D., Mohler, R., Machesney, B., Ning, T., Noble, W., Parent, R., Scheuerlein, R., Sprogis, E., Terman, L.Year:
1985
Language:
english
DOI:
10.1109/iedm.1985.191092
File:
PDF, 382 KB
english, 1985