[IEEE 2009 IEEE 59th Electronic Components and Technology Conference (ECTC 2009) - San Diego, CA, USA (2009.05.26-2009.05.29)] 2009 59th Electronic Components and Technology Conference - Modeling of thermal residual stresses of crack free GaN epitaxial film grown on patterned silicon substrates
Zhaohui Chen,, HanYan,, Zhiyin Gan,, Sheng Liu,Year:
2009
Language:
english
DOI:
10.1109/ectc.2009.5074266
File:
PDF, 825 KB
english, 2009