Interior Surface Plasma Immersion Ion Implantation of a Small Cylindrical Bore Using a Noncoaxial Parallel Auxiliary Electrode
Chengsen Liu,, He Liu,, Du Li,, Dezhen Wang,Volume:
37
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2009.2013228
Date:
July, 2009
File:
PDF, 466 KB
english, 2009